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Semicera
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Semiconductors & AI
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Etch ring

Quantity:
SKU: 5757773561
Model: Etch ring

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Product Details
Material Base: Pure CVD Solid SiC or High-Purity Silicon Single Crystal Plasma Erosion Rate: < 2 nm/min (Under high-density CF4/O2 plasma) Flatness Tolerance: <= 10 um Total Metal Purity: < 5 ppb (Parts per billion)